Lapping/Polishing Additive for Semiconductor Materials
Vector HTS-3 Details
Product is available in 5-gallon pails and 55-gallon drums.
Gallium Arsenide, Germanium, Sapphire, Silicon, Silicon Carbide
|Vector HTS-1.4EU||Vector HTS-1.3EU||Vector HTS-3||Vector HTN|
VECTOR HTS-3 should be mixed with deionized water and abrasive using the following slurry formula: 77-82% water, 15-18% abrasive, 3-5% VECTOR HTS-3. Use an agitator with a marine type propeller and a motor capable of 1750 RPM. Use a low shear dispense pump for feeding the mixed slurry onto the lap.
Disperse the abrasive with DI water between 500 and 1500 rpm for 10 minutes. Add HTS-3. Mix for approximately 5-10 minutes. A small vortex should form at the surface of the slurry. Turn the mixer off, or to a maximum of 50 rpm.
Product should be stored in a temperature controlled environment. Prolonged exposure to temperatures at or below 32° Fahrenheit (0°C) is discouraged. Prolonged exposure to temperatures at or above 100° Fahrenheit (38°C) is also discouraged. In addition, material should always be sealed when not in use to prevent evaporation.
Dispose of in accordance with all applicable local regulations.