Vector HTC

Ultrasonic Detergent for Semiconductor Materials

VECTOR HTC is an alkaline, aqueous-based ultrasonic detergent, formulated from non-ionic surfactants, detergencybuilders, soaps and wetting agents. Used at economicaldilution ratios, HTC will remove typicalresiduesfrom wafers after grinding, sawing, lapping, etching and polishing, and is specially formulated to increase the ultrasonic cavitational energy released upon the wafer surface. It may be used in heated or unheated ultrasonic tanks, and may also be used in regular dip tanks or as a flood to rinse wafers while still in process. VECTOR HTC is clear, colorless liquid, with a water-like viscosity. Benefits: • Superior wetting ability • Free rinsing - leaves no film or residue • Biodegradable • Economical in dilution • Fully compatible with other VECTOR products

Vector HTC Details

Base Material:


Shelf Life:

24 Months


Product is available in 5-gallon pails and 55-gallon drums.


Gallium Arsenide, Germanium, Sapphire, Silicon, Silicon Carbide

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Category - Sonic Cleaning

Handling Instructions

It is recommended that evaluation of VECTOR HTC begin at a dilution of 2% mixed with deionized (DI) water, although tap water that does not contain hard water ions is also acceptable. Since the type and degree of residue to be removed varies, these factors will ultimately determine specific “in-house” dilutions. Other factors to consider include wafer exposure time and the power of the ultrasonic equipment in use.


Product should be stored in a temperature controlled environment. Prolonged exposure to temperatures at or below 32° Fahrenheit (0°C) is discouraged. Prolonged exposure to temperatures at or above 100° Fahrenheit (38°C) is also discouraged. In addition, material should always be sealed when not in use to prevent evaporation.


Dispose of in accordance with all applicable local regulations.

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