Vector HTC-SCA-13

Ultrasonic/Megasonic Detergent

VECTOR HTC-SCA Series are water-based detergents formulated to increase the cavitational energy released upon the substrate surface by ultrasonic or megasonic apparatus. The products are designed for more effective cleaning of post-lapped, post-etched and post-polished substrates. Used at economical dilution ratios, VECTOR HTC-SCA Series will remove light organics, polymers and sub-micron particles typically found on the surface of semiconductor materials. These contaminants are often the cause of wafer staining and streaking upon examination after etch. VECTOR HTC-SCA Series detergents are recommended for pre-cleaning and final cleaning stages of solar silicon production lines, wherever ultrasonic cleaning is applied. These products will remove organic and inorganic contamination and particles from both mono-crystalline and multi-crystalline silicon. VECTOR HTC-SCA Series can be used in heated or unheated ultrasonic tanks, and are also recommended for brush and dip tank applications. Benefits: • Superior wetting ability • Free rinsing - leaves no film or residue • Fully compatible with other VECTOR products • Economical to use and easy to filter

Vector HTC-SCA-13 Details

Base Material:


Shelf Life:

24 Months


Product is available in 5-gallon pails and 55-gallon drums.


Gallium Arsenide, Germanium, Sapphire, Silicon, Silicon Carbide

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Base Material WaterWaterWaterWater
Specific Gravity1.051.05
Category - Sonic Cleaning

Handling Instructions

It is recommended that evaluation of VECTOR HTC-SCA Series begin at dilutions of 4% mixed with deionized (DI) water, although tap water that does not contain hard water ions is also acceptable. Since the type and degree of residue to be removed varies, these factors will ultimately determine specific “in-house” dilutions. Other factors to consider include wafer exposure time and the power of the ultrasonic equipment in use.


Product should be stored in a temperature controlled environment. Prolonged exposure to temperatures at or below 32° Fahrenheit (0°C) is discouraged. Prolonged exposure to temperatures at or above 100° Fahrenheit (38°C) is also discouraged. In addition, material should always be sealed when not in use to prevent evaporation.


Dispose of in accordance with all applicable local regulations.

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