Ultrasonic/Megasonic Detergent

VECTOR HTC-PLUS is an alkaline, water-based ultrasonic/megasonic detergent formulated to increase the cavitational energy released upon the substrate surface for more effective cleaning. Usedat economical dilution ratios, VECTOR HTC-PLUS will remove light organics and sub-micron particles, and is typically used to remove post-process residues after grinding, slicing, lapping and polishing. VECTOR HTC-PLUS can be used in heated or unheated ultrasonic tanks, and is also recommended for brush and dip tank applications. Benefits: • Superior wetting ability • Free rinsing - leaves no film or residue • Fully compatible with other VECTOR products

Vector HTC-PLUS Details

Base Material:


Shelf Life:

24 Months


Product is available in 5-gallon pails and 55-gallon drums.


Gallium Arsenide, Germanium, Sapphire, Silicon, Silicon Carbide

Similar Products

Vector HTC-SCA-1Vector HTCVector HTC-SCAVector HTC-SCA-2
Base Material WaterWaterWaterWater
Specific Gravity1.051.05
Category - Sonic Cleaning

Handling Instructions

It is recommended that evaluation of VECTOR HTC begin at a dilution of 2% mixed with deionized (DI) water, although tap water that does not contain hard water ions is also acceptable. Since the type and degree of residue to be removed varies, these factors will ultimately determine specific “in-house” dilutions. Other factors to consider include wafer exposure time and the power of the ultrasonic equipment in use.


Product should be stored in a temperature controlled environment. Prolonged exposure to temperatures at or below 32° Fahrenheit (0°C) is discouraged. Prolonged exposure to temperatures at or above 100° Fahrenheit (38°C) is also discouraged. In addition, material should always be sealed when not in use to prevent evaporation.


Dispose of in accordance with all applicable local regulations.

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