CMP Finishing Pad

The SPM3100 poromeric technology was developed for silicon final polishing, and has also been used in a variety of other materials where surface finish is defined by haze, microscratches, and light point defects. The SPM3100 features a proprietary pore structure grown directly on a Mylar substrate. The simplicity of this design combined with the unique pore structure reduces variations in pad physical properties, ultimately leading to more consistent performance throughout the life of the pad and a much lower nanoscratch level.

SPM3100 Details

Base Material:


Shelf Life:

12 Months


Pads are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Pads should always remain flat. Bending pads during handling can cause wrinkles in the PSA and premature delamination of the release liner.


Berylium, Fused Silica, Germanium, Lithium Niobate, Lithium Tantalate, Silicon, Silicon Carbide

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Category - Polishing Pads

Handling Instructions

Apply only to a clean, dry surface at room temperature. If an appropriate solvent, such as isopropyl alcohol, is used to clean the platen after a pad removal, allow the platen to dry completely and return to room temperature before applying a new pad. Solvents remaining on the platen or an unusually cold platen will lower PSA adhesion.

When applying the pad to the platen, peel the release liner from one edge of the pad. Fold liner back approximately 2 inches. Align the pad with the edge of the platen and adhere. In one continuous movement, slowly peel the remaining release liner off the pad while pressing the pad down on the platen. The application should be smooth and uniform with even pressure from the pad mounting tool (such as a flat disk or hand roller).

Do not try to reposition pads with PSA adhesive.


Product should be stored and transported in the original packaging. The product should be stored in temperatures between 10°C to 24°C (50°F to 75°F) and <50% humidity. Exposure for six (6) months or less to conditions between -17°C to 48°C (0°F and 120°F) and/or at relative humidity of up to 100% will not impact the product performance as long as the release liner remains intact and attached to the PSA. If the product is exposed to temperatures and humidity outside the recommended conditions, it may still be acceptable for use. In all cases, the product should be allowed to return to normal room temperatures prior to use.


Dispose of in accordance with all applicable local regulations.

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