Template Assembly with E310 Film
E310 backing film is durable in highly alkaline or acidic chemical processes. The E310 film is one of our low compressible films, resulting in flatness consistency throughout the lifetime of the template.General Waxless Fixturing Benefits:Easy Application – pressure sensitive adhesive on template assemblies allows easy application to carrier plates.Easy Removal – wafers are easily removed with a water pick or in a water bath after polishing.No De-Waxing Clean Step Required – no chemicals are used to hold wafers.No CFCs – template assemblies are environmentally friendly and non-hazardous.
NTA E310 Details
Fixtures are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Fixtures should always remain flat. Bending fixtures during handling can cause wrinkles in the PSA and premature delamination of the release liner.
|NTA WB20||NTA E303||NTA E310||NTA CHOIS||NTA DF200|
|Backing Film Compressibility||3.45||3.49||5.75||9.01||10.6|
|Pocket Depth Range||0.004||0.004||0.004||0.004||0.004|
Only apply to a clean, dry surface at room temperature. If an appropriate solvent, such a isopropyl alcohol, is used to clean the carrier plate after an NTA removal, allow the carrier plate to dry completely and return to room temperature before applying the NTA. Solvents remaining on the carrier plate or an unusually cold carrier plate will lower PSA adhesion.
When applying the NTA to the carrier plate, peel the release liner from one edge of the NTA. Fold liner back approximately 2 inches. Align the NTA with the edge of the carrier plate and adhere. In one continuous movement, slowly peel the remaining release liner off the NTA while pressing the NTA down on the carrier plate. The application should be smooth and uniform with even pressure from the pad mounting tool (such as a flat disk or hand roller).
Do not try to reposition NTAs with PSA II adhesive.
Product should be stored and transported in the original packaging. The product should be stored in temperatures between 10°C to 24°C (50°F to 75°F) and <50% humidity. Exposure for six (6) months or less to conditions between -17°C to 48°C (0°F and 120°F) and/or at relative humidity of up to 100% will not impact the product performance as long as the release liner remains intact and attached to the PSA. If the product is exposed to temperatures and humidity outside the recommended conditions, it may still be acceptable for use. In all cases, the product should be allowed to return to normal room temperatures prior to use.
Dispose of in accordance with all applicable local regulations.