Industry standard CMP colloidal silica for ILD and STI
® Klebosol is a registered trademark of Merck KGaA, Darmstadt, Germany or its affiliates.
Klebosol® 1501-50 Details
Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.
|Klebosol® 1501-50||Klebosol® 1508-50||Klebosol® 30H50||Klebosol® 30N50||Klebosol® 30N50PHN|
|Base Material||Colloidal Silica||Colloidal Silica||Colloidal Silica||Colloidal Silica||Colloidal Silica|
|Particle Size (um)||0.05||0.05||0.05||0.05||0.05|
Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.
Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.
Dispose of in accordance with all applicable local regulations.