Dow® CUS1351

Copper Barrier Slurry

The CUS1351 barrier slurry for copper CMP was designed to improve upon the dishing and erosion results obtained after first step polishing while removing any residual copper present after the first step polishing process. CUS1351 provides excellent final surface quality with low defectivity and surface roughness.

Dow® CUS1351 Details

Base Material:

Colloidal Silica

Shelf Life:

12 Months

Packaging:

Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.

Similar Products

Dow ACuPLANE LK393c4
Base Material Colloidal Silica
pH10.4
Solids Content12

Complementary Products

Category - Polishing Slurries

Handling Instructions

Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.

Storage

Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.

Disposal

Dispose of in accordance with all applicable local regulations.

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