Dow ACuPLANE LK393c4

Copper Barrier Slurry

The LK393c4 Copper Barrier slurry, the latest addition to the LK Series, is an alkaline mixture of ultra-pure water, colloidal silica, and proprietary additives that enable its robust process performance. With a 1:1 selectivity of copper; to low-k dielectric and a high TEOS rate, the semi-selective LK393c4 slurry is ideal for 90 and 65nm low-k integration schemes. The LK393c4 slurry enables users, during their copper barrier process, to maintain or slightly improve the copper topography results achieved after copper clear. Additionally, the slurry’s selectivity and removal rates have enabled users to achieve a 25 to 30 percent improvement in wafer throughput and cost -of-ownership over competitive slurry formulations. Suitable for use with both soft pads and new-generation pad platforms, the LK393c4 slurry delivers the consistently high removal rates, at low pressures, needed for CMP in next-generation copper barrier processes.

Dow ACuPLANE LK393c4 Details

Base Material:

Colloidal Silica

Shelf Life:

12 Months

Packaging:

Standard packaging comes in two sizes: 5 gallon, and 55 gallon. Standard totes also come in two sizes: 264 gallon and 330 gallon. These totes are rigid, virgin, HDPE vessels in an aluminum cage overpack. The openings are six-inch buttress with a two-inch NPT bung with a bottom drain. They can accept dip tubes or other commercially available dispense systems.

Similar Products

Dow® CUS1351
Base Material Colloidal Silica
Particle Size (um)
pH8.9
Solids Content12.4

Complementary Products

Category - Polishing Slurries

Handling Instructions

Storage tanks and distribution piping should be constructed of engineering plastic, such as polyethylene, polypropylene, or PTFE. Materials such as aluminum, copper, brass, and PVC should be avoided. Avoid leaving slurry containers open for extended periods of time. Leaving containers open may result in drying which can cause wafer scratching. Consult your Eminess representative for recommendations when designing handling systems and optimum point of use filtration schemes.

Storage

Storage outside of the recommended conditions may result in irreversible product degradation. Products can be stored up to the expiration date between the temperatures range of 0°C - 45°C (32°F - 113°F). Avoid prolonged exposure at temperatures at either extreme. In the event of exposure outside of the recommended conditions, please contact your Eminess technical representative for recommendations. In all cases the products should be allowed to return to a room temperature prior to use. All shipments include temperature indicators to monitor shipping conditions.

Disposal

Disposal in accorance with all applicable local regulations.

Contact Information

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