DF200 Carrier Film

Protective Film with Laser-cut Vaccuum Holes

Carrier films are commonly used to protect wafers held in place by vacuum chuck heads in specially designed CMP tools. The soft, DF200 film protects the backside of the wafer from damage, while precision laser-cut holes allow for strong vacuum adhesion.

DF200 Carrier Film Details

Base Material:


Shelf Life:

12 Months


Products are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Product should always remain flat. Bending films during handling can cause wrinkles in the PSA and premature delamination of the release liner.

Similar Products

WB20 Carrier Film
Base Material Poromeric
Category - Polishing Fixtures

Handling Instructions

Only apply to a clean, dry surface at room temperature. If an appropriate solvent, such a isopropyl alcohol, is used to clean the carrier head after a film removal, allow the carrier head to dry completely and return to room temperature before applying the film. Solvents remaining on the platen or an unusually cold platen will lower PSA adhesion.

When applying the film to the carrier head, peel the release liner from one edge of the film. Fold liner back approximately 2 inches. Align the film with the edge of the platen and adhere. In one continuous movement, slowly peel the remaining release liner off the film while pressing the film down on the carrier head. The application should be smooth and uniform with even pressure from the pad mounting tool (such as a flat disk or hand roller).

Do not try to reposition films with PSA II adhesive.


Product should be stored and transported in the original packaging. The product should be stored in temperatures between 10°C to 24°C (50°F to 75°F) and <50% humidity. Exposure for six (6) months or less to conditions between -17°C to 48°C (0°F and 120°F) and/or at relative humidity of up to 100% will not impact the product performance as long as the release liner remains intact and attached to the PSA. If the product is exposed to temperatures and humidity outside the recommended conditions, it may still be acceptable for use. In all cases, the product should be allowed to return to normal room temperatures prior to use.


Dispose of in accordance with all applicable local regulations.

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