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+ Semi-Conductor Chemical Mechanical Planarization (CMP)
Interlayer Dielectric (ILD)
Shallow Trench Isolation (STI)
Tungsten
Copper
Polysilicon
Platinum
+ Specialty Substrate CMP Polishing
Nickel Iron NiFe
Nickel Iron Cobalt NiFeCo
Quartz SiO2
Sapphire Al2O3
Gallium Arsenide GaAs
Gallium Antimonide GaSb
Gallium Nitride GaN
Indium Phosphide InP
Indium Gallium Phosphide InGaP
Lithium Niobate LiNbO3
Lithium Tantalate LiTaO3
Aluminum Nitride AlN
Silicon Germanium SiG
Silicon Carbide SiC
Yttrium Aluminum Garnet YAG
+ Magneto-Resistive Device Polishing
Nickel Iron NiFe, Nickel Iron Cobalt NiFeCo
+ NEW Products
EMINESS Specialty Substrate Slurries
+ Ultra-Sol™ Slurries
Ultra-Sol™ Ceria Slurries
Ultra-Sol™ Silica Slurries
Ultra-Sol™ Zirconia Slurries
Ultra-Sol™ Alumina Slurries
Ultra-Sol™ Fiber Optics Slurries
Ultra-Sol™ Diamond Suspensions
+ Polishing Systems
Glass Polishing Systems
Optical Polishing: Colloidal Silica
Optical Polishing: Colloidal Alumina
Fiber Optic Polishing System
Specialty Slurries
Ultra-Lox™ Powders
Site Map

POLISHING PADS

Impregnated Pads

Product Average Thickness(in) Average Hardness Average Compressibility (%) VO (Vertical Pore Height)(in) Specific Gravity Embossed Perforated
SUBA® SERIES
500 .050 72 (Shore A) 7 N/A N/A Yes Yes
550 .050 73 (Shore A) 6 N/A N/A No No
H2 .050 81 (Shore A) 7 N/A N/A No No
IV .050 61 (Shore A) 15 N/A N/A Yes Yes
X .050 66 (Shore A) 10 N/A N/A Yes Yes
1200 .050 80 (Shore A) 5.4 N/A N/A No No
GS SERIES
GS BB .150 67 (Shore A) 10 N/A N/A Yes No
GS BB .180 64 (Shore A) 10 N/A N/A Yes No
GS BK .220 67 (Shore A) N/A N/A N/A Yes No
These values represent typical measurements. Actual values may vary in a range defined by product specifications

Coated Pads

Product Average Thickness(in) Average Compressibility (%) VO (Vertical Pore Height (in) Microporous Height (in) Embossed Perforated
OPC SERIES (same as DPC)
OPC 5150 0.038 N/A 0.017 0.008 No No
OPC 6350 0.04 N/A 0.020 0.008 No No
SPM SERIES
SPM3100 .028 N/A 0.0205 N/A No No
POLITEX® SERIES
POLITEX® REG .056 N/A 0.015 0.006 Yes No
POLITEX® HIGH .060 N/A 0.020 0.006 Yes No
These values represent typical measurements. Actual values may vary in a range defined by product specifications

Other Pads

Product Average Thickness(in) Average Hardness Average Compressibility (%) VO (Vertical Pore Height)(in) Specific Gravity Embossed Perforated
MH SERIES
MH C14B .059 79 (JIS-A) N/A N/A 0.42 No No
MH N15A 0.039 85 (JIS-A) N/A N/A 0.53 No No
IC SERIES
IC1000™ .050 57 (Shore D*) 2.25 N/A 0.71 No Yes
IC1400™ .099-.110 57 (Shore D*) 0.7 - 6.6 N/A N/A No Yes
IC1010™ (for Mirra platform only) .080 52-62 (Shore D*) 0.5 - 4.0 N/A N/A No No
These values represent typical measurements. Actual values may vary in a range defined by product specifications

* A hardness measurement of 57 Shore D corresponds to a 95 Shore A reading.

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