Units of Measure

Common Units of Measure in the Polishing Industry

Unit System Dimension Common Uses
Angstrom (Å) Metric 0.0000000001m
0.1 nm
10x-10
10x-4µm
Surface Roughness
Removal Rates
Nanometer (nm) Metric 0.000000001m
10x-9
10x-3µm
Removal Rates
Slurry Particle Size
Micrometer Micron (µ) Metric 0.000001 m
0.1 nm
10x-6m
Removal Rates
Slurry Particle Size
Wafer Flatness
TTV
Mil Thousandth Standard 0.001” Pad Thickness
Wafer Thickness
Pocket Depths on Templates

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