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+ Semi-Conductor Chemical Mechanical Planarization (CMP)
Interlayer Dielectric (ILD)
Shallow Trench Isolation (STI)
Tungsten
Copper
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Platinum
+ Specialty Substrate CMP Polishing
Nickel Iron NiFe
Nickel Iron Cobalt NiFeCo
Quartz SiO2
Sapphire Al2O3
Gallium Arsenide GaAs
Gallium Antimonide GaSb
Gallium Nitride GaN
Indium Phosphide InP
Indium Gallium Phosphide InGaP
Lithium Niobate LiNbO3
Lithium Tantalate LiTaO3
Aluminum Nitride AlN
Silicon Germanium SiG
Silicon Carbide SiC
Yttrium Aluminum Garnet YAG
+ Magneto-Resistive Device Polishing
Nickel Iron NiFe, Nickel Iron Cobalt NiFeCo
+ NEW Products
EMINESS Specialty Substrate Slurries
+ Ultra-Sol™ Slurries
Ultra-Sol™ Ceria Slurries
Ultra-Sol™ Silica Slurries
Ultra-Sol™ Zirconia Slurries
Ultra-Sol™ Alumina Slurries
Ultra-Sol™ Fiber Optics Slurries
Ultra-Sol™ Diamond Suspensions
+ Polishing Systems
Glass Polishing Systems
Optical Polishing: Colloidal Silica
Optical Polishing: Colloidal Alumina
Fiber Optic Polishing System
Specialty Slurries
Ultra-Lox™ Powders
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COLLOIDAL SILICA OPTICAL POLISHING SYSTEMS

Benefits

Eminess offers an established line of high-purity slurries, standard slurries, unique non-drying slurries and Rohm and Haas (formerly Rodel®) premier pad technologies. This partnership in sophisticated industry proven products is designed to help improve your processes and provide superior finishes.

Pads

IC1000™- A hard, minimally compressible, microporous polyurethane material designed to provide excellent removal rates and local planarization.

SUBA® SERIES - Porous, polyurethane-impregnated felts available in a variety of hardnesses and compressibility ranges specifically designed to meet the challenging removal rates, flatness and waviness requirements for stock polishing.

POLITEX® - Rohm and Haas (formerly Rodel®) signature technology, this soft, poromeric pad was designed for final polishing a variety of substrates. Politex pads are available with a longer nap height to provide superior surface roughness.

Slurries

ULTRA-SOL™ 300K - Non-drying colloidal silica designed for polishing precision Opto-Electronic materials such as Silicon, Gallium Aresnide, Indium Phosphide, Sapphire, and Germanium, IR materials, and finial polish for diamond. Produced in alkaline pH range of 9.2

ULTRA-SOL™ 500S N/D - Colloidal silica with a specially designed alkaline dispersion that eliminates problems caused by drying or freezing associated with other colloidal silica products. Physical properties make it a non-drying, non-caking and non-crystallizing slurry which helps to reduce latent scratches. It is capable of producing surfaces of less than 10 angstroms Rms under optimum conditions.

STANDARD COLLOIDAL SILICAS: ULTRA-SOL™ XA,  ULTRA-SOL™ 7H - Standard colloidal silicas available in a wide range of particle sizes, percent solids and pH ranges. They have an opaqueness from transparent to translucent, depending on the % solids contained.

Suggested Consumable Combinations

Applications IC1000 Suba Series Politex Ultra-Sol™ 300K Ultra-Sol™ 500S N/D Ultra-Sol™ 1A - 7A Ultra-Sol™ 1H - 7H
Silicon   X   X   X X
Quartz   X X   X X X
Lithium Niobate   X X X X X X
Sapphire X       X X X
YAG   X   X X X X
GGG   X X X X X X

Product Properties

Pads

Product Average Thickness Average Hardness Average Compressibility (%) VO (Vertical Pore Height)
IC SERIES
IC1000 .050 inch 57 (Shore D) 2.3 N/A
SUBA® SERIES
IV .050" 61 (Shore A) 15 N/A
X .050" 66 (Shore A) 10 N/A
500 .050" 72 (Shore A) 7 N/A
550 .050" 73 (Shore A) 6 N/A
H2 .050" 78 (Shore A) 6 N/A
POLITEX® SERIES
POLITEX® REG .056 N/A N/A 0.015"
POLITEX® HIGH .060 N/A N/A 0.020"
These values represent typical measurements. Actual values may vary in a range defined by product specifications.

Slurries

Product pH Solids(%) Mean Particle Size Color
ULTRA-SOL™ 300K 9 50 0.05µ Blue
ULTRA-SOL™ 500S N/D 9.2 40 0.08µ Blue
ULTRA-SOL™ 3A through 7H 2 - 11 40 1.0µ Brown
These values represent typical measurements. Actual values may vary in a range defined by product specifications.

 

FOR CUSTOM REQUESTS, PRICING, OR ORDERING INFORMATION

CALL 1-888-899-1942