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+ Semi-Conductor Chemical Mechanical Planarization (CMP)
Interlayer Dielectric (ILD)
Shallow Trench Isolation (STI)
Tungsten
Copper
Polysilicon
Platinum
+ Specialty Substrate CMP Polishing
Nickel Iron NiFe
Nickel Iron Cobalt NiFeCo
Quartz SiO2
Sapphire Al2O3
Gallium Arsenide GaAs
Gallium Antimonide GaSb
Gallium Nitride GaN
Indium Phosphide InP
Indium Gallium Phosphide InGaP
Lithium Niobate LiNbO3
Lithium Tantalate LiTaO3
Aluminum Nitride AlN
Silicon Germanium SiG
Silicon Carbide SiC
Yttrium Aluminum Garnet YAG
+ Magneto-Resistive Device Polishing
Nickel Iron NiFe, Nickel Iron Cobalt NiFeCo
+ NEW Products
EMINESS Specialty Substrate Slurries
+ Ultra-Sol™ Slurries
Ultra-Sol™ Ceria Slurries
Ultra-Sol™ Silica Slurries
Ultra-Sol™ Zirconia Slurries
Ultra-Sol™ Alumina Slurries
Ultra-Sol™ Fiber Optics Slurries
Ultra-Sol™ Diamond Suspensions
+ Polishing Systems
Glass Polishing Systems
Optical Polishing: Colloidal Silica
Optical Polishing: Colloidal Alumina
Fiber Optic Polishing System
Specialty Slurries
Ultra-Lox™ Powders
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COLLOIDAL ALUMINA OPTICAL POLISHING SYSTEMS

Benefits

Eminess offers total solutions for colloidal alumina optical polishing to fulfill the industry's chemical mechanical polishing needs. Theses slurries have a low acidic dispersion and can be manufactured in a broad range of particle sizes.

Pads

IC1000™- A hard, minimally compressible, microporous polyurethane material designed to provide excellent removal rates and local planarization.

SUBA® SERIES - Porous, polyurethane-impregnated felts available in a variety of hardnesses and compressibility ranges specifically designed to meet the challenging removal rates, flatness and waviness requirements for stock polishing.

POLITEX® - Grown in-place porometic that incorporates a unique, vertically oriented pore structure with a compressible substrate. Designed to instantaneously recover from polishing compression by enhancing slurry flow in the pad and reducing pad loading.

Slurries

ULTRA-SOL™ 200A - An acidic dispersion, its chemical-mechanical action provides asuperior surface finishes on a wide variety of applications including II-VI materials, ferrites and carbides. Ultra-Sol's low scatter finishes have also been obtained on pure metals, epoxy resins and plastics.

ULTRA-SOL™ 201A/280,  ULTRA-SOL™ 201A/140,  ULTRA-SOL™ 201A/60 - These slurries are effective on the same materials as the 200A slurry but provide a better solution for your process when a finer particle is required. All of these slurries can be used in full concentration or diluted with filtered, deionized water. The only difference between these slurries is their particle size. The smaller the particle, the finer the finish.

Suggested Consumable Combinations

Applications IC1000 Suba Series Politex Ultra-Sol™ 200A Ultra-Sol™ 201A/280 Ultra-Sol™ 201A/140 Ultra-Sol™ 201A/60
Silicon   X   X X X X
Germanium   X X X X X  
Gallium Arsenide X X X X X X X
Zinc Sulfide     X X X X X
Zinc Sellenide     X X X X X
Silicon Carbide   X   X      
Nickel X X X     X X
Tungsten       X X    
Copper X X       X X
Beryllium X X X X X    
Steel X X X X X    
Aluminum X X   X X X  

Product Properties

Pads

Product Average Thickness Average Hardness Average Compressibility (%) VO (Vertical Pore Height)
IC SERIES
IC1000™ .050 inch 57 (Shore D) 2.3 N/A
SUBA® SERIES
IV .050" 61 (Shore A) 15 N/A
X .050" 66 (Shore A) 10 N/A
500 .050" 72 (Shore A) 7 N/A
550 .050" 73 (Shore A) 6 N/A
H2 .050" 78 (Shore A) 6 N/A
POLITEX® SERIES
POLITEX® REG .056 N/A N/A N/A
POLITEX® HIGH .060 N/A N/A N/A
These values represent typical measurements. Actual values may vary in a range defined by product specifications.

Slurries

Product pH Solids(%) Functional Particle Size* Color
ULTRA-SOL™ 200A 3.5 to 4.0 20 1.00µ White
ULTRA-SOL™ 201A/280 3.5 to 4.0 20 0.28µ White
ULTRA-SOL™ 201A/140 3.5 to 4.0 20 0.14µ White
ULTRA-SOL™ 201A/60 3.5 to 4.0 20 0.06µ White
These values represent typical measurements. Actual values may vary in a range defined by product specifications.
*Functional Particle Size

 

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