COLLOIDAL ALUMINA OPTICAL POLISHING SYSTEMS
Benefits
Eminess offers total solutions for colloidal alumina optical polishing to fulfill the
industry's chemical mechanical polishing needs. Theses slurries have a low acidic dispersion and can
be manufactured in a broad range of particle sizes.
Pads
IC1000™- A hard, minimally compressible, microporous polyurethane material
designed to provide excellent removal rates and local planarization.
SUBA® SERIES - Porous, polyurethane-impregnated felts available in a variety of hardnesses
and compressibility ranges specifically designed to meet the challenging removal rates,
flatness and waviness requirements for stock polishing.
POLITEX® - Grown in-place porometic that incorporates a unique, vertically
oriented pore structure with a compressible substrate. Designed to instantaneously recover from
polishing compression by enhancing slurry flow in the pad and reducing pad loading.
Slurries
ULTRA-SOL™ 200A - An acidic dispersion, its chemical-mechanical action
provides asuperior surface finishes on a wide variety of applications including II-VI materials, ferrites and carbides.
Ultra-Sol's low scatter finishes have also been obtained on pure metals, epoxy resins and plastics.
ULTRA-SOL™ 201A/280, ULTRA-SOL™ 201A/140, ULTRA-SOL™ 201A/60 -
These slurries are effective on the same materials as the 200A slurry but provide a better solution for
your process when a finer particle is required. All of these slurries can be used in full concentration or diluted with
filtered, deionized water. The only difference between these slurries is their particle size.
The smaller the particle, the finer the finish.
Suggested Consumable Combinations
| Applications |
IC1000 |
Suba Series |
Politex |
Ultra-Sol™ 200A |
Ultra-Sol™ 201A/280 |
Ultra-Sol™ 201A/140 |
Ultra-Sol™ 201A/60 |
| Silicon |
  |
X |
  |
X |
X |
X |
X |
| Germanium |
  |
X |
X |
X |
X |
X |
|
| Gallium Arsenide |
X |
X |
X |
X |
X |
X |
X |
| Zinc Sulfide |
|
  |
X |
X |
X |
X |
X |
| Zinc Sellenide |
  |
|
X |
X |
X |
X |
X |
| Silicon Carbide |
  |
X |
|
X |
|
|
|
| Nickel |
X |
X |
X |
|
|
X |
X |
| Tungsten |
  |
|
|
X |
X |
|
|
| Copper |
X |
X |
|
|
|
X |
X |
| Beryllium |
X |
X |
X |
X |
X |
|
|
| Steel |
X |
X |
X |
X |
X |
|
|
| Aluminum |
X |
X |
|
X |
X |
X |
|
Product Properties
Pads
| Product |
Average Thickness |
Average Hardness |
Average Compressibility (%) |
VO (Vertical Pore Height) |
| IC SERIES |
|
|
|
|
| IC1000™ |
.050 inch |
57 (Shore D) |
2.3 |
N/A |
| SUBA® SERIES |
|
|
|
|
| IV |
.050" |
61 (Shore A) |
15 |
N/A |
| X |
.050" |
66 (Shore A) |
10 |
N/A |
| 500 |
.050" |
72 (Shore A) |
7 |
N/A |
| 550 |
.050" |
73 (Shore A) |
6 |
N/A |
| H2 |
.050" |
78 (Shore A) |
6 |
N/A |
| POLITEX® SERIES |
|
|
|
|
| POLITEX® REG |
.056 |
N/A |
N/A |
N/A |
| POLITEX® HIGH |
.060 |
N/A |
N/A |
N/A |
These values represent typical measurements. Actual values may vary in
a range defined by product specifications.
Slurries
These values represent typical measurements. Actual values may vary in
a range defined by product specifications.
*Functional Particle Size
FOR CUSTOM REQUESTS, PRICING, OR ORDERING INFORMATION
CALL 1-888-899-1942